Precise spectrophotometric method for semitransparent metallic thin-film index determination using interference enhancement

IF 1.9 4区物理与天体物理 Q3 OPTICS Journal of the European Optical Society-Rapid Publications Pub Date : 2021-07-23 DOI:10.21203/RS.3.RS-660206/V1

R. Shurvinton, F. Lemarchand, A. Moreau, J. Lumeau

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引用次数: 2

Abstract

A precise spectrophotometric method to determine the refractive index of a semitransparent metallic thin film is presented. This method relies on interference enhancement of the measured spectra, employing an opaque substrate with a dielectric spacer layer beneath the absorbing layer of interest to create interference fringes.The resulting spectral oscillations of the stack are highly sensitive to the properties of the top absorbing layer, allowing precise determination of the refractive index via fitting. The performance of this method is verified using simulations in comparison to the typical method of depositing the absorbing thin film directly onto a transparent substrate. An experimental demonstration is made for titanium thin films over the visible range (370-835 nm). The refractive index of these films is extracted from experimental data using a combination of the Modified Drude and Forouhi-Bloomer models. This method showed high repeatability and precision, and is verified for Ti films between 6-70 nm thickness.

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干涉增强精密分光光度法测定半透明金属薄膜折射率

提出了一种精确测定半透明金属薄膜折射率的分光光度法。这种方法依赖于测量光谱的干涉增强，采用不透明的衬底，在感兴趣的吸收层下面有一个介电间隔层来产生干涉条纹。由此产生的光谱振荡对顶部吸收层的特性高度敏感，允许通过拟合精确确定折射率。通过仿真，与直接在透明衬底上沉积吸收薄膜的典型方法进行了比较，验证了该方法的性能。在可见光范围(370 ~ 835 nm)对钛薄膜进行了实验论证。利用改进的Drude模型和Forouhi-Bloomer模型的组合，从实验数据中提取了这些薄膜的折射率。该方法具有较高的重复性和精密度，适用于厚度为6 ~ 70 nm的Ti薄膜。

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来源期刊

Journal of the European Optical Society-Rapid Publications 物理-光学

CiteScore

2.40

自引率

0.00%

发文量

审稿时长

5 weeks

期刊介绍： Rapid progress in optics and photonics has broadened its application enormously into many branches, including information and communication technology, security, sensing, bio- and medical sciences, healthcare and chemistry. Recent achievements in other sciences have allowed continual discovery of new natural mysteries and formulation of challenging goals for optics that require further development of modern concepts and running fundamental research. The Journal of the European Optical Society – Rapid Publications (JEOS:RP) aims to tackle all of the aforementioned points in the form of prompt, scientific, high-quality communications that report on the latest findings. It presents emerging technologies and outlining strategic goals in optics and photonics. The journal covers both fundamental and applied topics, including but not limited to: Classical and quantum optics Light/matter interaction Optical communication Micro- and nanooptics Nonlinear optical phenomena Optical materials Optical metrology Optical spectroscopy Colour research Nano and metamaterials Modern photonics technology Optical engineering, design and instrumentation Optical applications in bio-physics and medicine Interdisciplinary fields using photonics, such as in energy, climate change and cultural heritage The journal aims to provide readers with recent and important achievements in optics/photonics and, as its name suggests, it strives for the shortest possible publication time.