PECULIARITIES AND ADVANTAGES OF STUDYING THE SURFACES OF SPACE TECHNIQUE MATERIALS BY ATOMIC FORCE MICROSCOPY

Pub Date : 2023-03-14 DOI:10.15407/knit2023.01.065
O. Shevchenko, A. I. Itsenko, M. Bondarenko
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Abstract

The article presents the advantages of the atomic force microscopy (AFM) method as one of the most versatile and promising methods for studying the surfaces of space engineering materials. A comparison of the results of the study of such materials using the example of aluminum nitride (AlN) by the methods of scanning electron microscopy (SEM) and AFM was carried out. As a result of the comparison, it was established that, despite the higher resolution of the SEM method, its main disadvantages are the impossibility of vertical scanning of surfaces and the lack of an opportunity to study their physical and mechanical properties. The main features of the process of studying the topography of surfaces using the AFM method have been established. They are the possibility of high-precision positioning of the measuring instrument (with the accuracy of determining a given area — up to 40 nm), elimination of distortion of the obtained image of the studied area, and automatic correction of the research speed. The arithmetic mean values of the micro-roughnesses of the aluminum nitride surfaces obtained by the AFM method were determined both for samples that were not exposed to extreme environmental conditions (Ra = 147 nm; Rq = 163 nm) and samples that were exposed to extreme environmental conditions for a long time (120...140 hours), which simulates space conditions (temperature 550 °С, pressure 6.8...7.2 μbar) (Ra = 381 nm; Rq = 422 nm). The maximum porosity in the surface layer (up to 1.5 μm) of aluminum nitride samples was also determined in the range of 3...5.2%.
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原子力显微镜研究空间技术材料表面的特点和优点
本文介绍了原子力显微镜(AFM)方法作为研究空间工程材料表面最通用、最有前途的方法之一的优点。以氮化铝(AlN)为例,通过扫描电子显微镜(SEM)和AFM的方法对这种材料的研究结果进行了比较。比较结果表明,尽管SEM方法的分辨率较高,但其主要缺点是无法对表面进行垂直扫描,并且缺乏研究其物理和机械性能的机会。建立了利用AFM方法研究表面形貌过程的主要特征。它们是测量仪器高精度定位的可能性(确定给定区域的精度高达40nm),消除所研究区域获得的图像失真,以及自动校正研究速度。通过AFM方法获得的氮化铝表面的微粗糙度的算术平均值对于未暴露于极端环境条件(Ra=147nm;Rq=163nm)的样品和长时间暴露在极端环境条件下(120…140小时)的样品都被确定,模拟空间条件(温度550°С,压力6.8…7.2μbar)(Ra=381 nm;Rq=422 nm)。氮化铝样品表面层(高达1.5μm)的最大孔隙率也在3…5.2%的范围内。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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