Ultrafast laser micromachining of angled surfaces in fused silica

Abstract

Angled surfaces are significant for obtaining complex 3D glass structures to be employed in precise optical components such as light guides. However, it is challenging to fabricate angled structures in glass with high precision. In this study, femtosecond laser irradiation followed by a chemical etching process is used to create a 45-degree angled surface. The roughness values of the angled top and bottom surfaces are compared and the parameters are optimized to achieve maximum surface quality. A 45-degree angled surface with <300 nm roughness and <±0.5° deviation is obtained in a given area of 1 × 1.5 mm2. Using this approach, various complex structures have been successfully fabricated with high quality and precision. Results indicate that this method can be adapted to the high-precision glass manufacturing industry.