Oxygen plasma assisted room temperature bonding for manufacturing SU-8 polymer micro/nanoscale nozzle

IF 6.1 3区材料科学 Q1 CHEMISTRY, MULTIDISCIPLINARY Nanotechnology Reviews Pub Date : 2023-01-01 DOI:10.1515/ntrev-2023-0113

R. Guo, Xuan Li, Weilong Niu, Jianbo Feng

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Abstract

Abstract Electrohydrodynamic-jet (E-jet) printing is an on-demand additive manufacturing method that allows various functional materials to be directly deposited on the target substrate. Many theoretical and experimental results indicate that E-jet has scale effect, and reducing the inner diameter of the nozzle can effectively improve printing resolution. Herein, a method for fabricating SU-8 polymer micro/nanoscale nozzle by oxygen plasma assisted room temperature bonding was proposed. It can prevent channel deformation and blockage caused by excessive bonding temperature. The surface modification parameters of silicon nano-mold were optimized, the influence of hot embossing parameters on the replication precision of nano patterns was investigated, the effect of UV lithography parameters on the micro and nanochannel was analyzed, the relationship between the oxygen plasma treatment parameters on the contact angle of SU-8 was revealed, the influence of bonding pressure on the morphology of the nanochannel was discussed, and the bonding principle at room temperature was deeply analyzed. This method can fabricate SU-8 polymer micro/nanoscale nozzle with low cost and high precision, and provide a new idea for the realization of room temperature bonding to manufacture SU-8 polymer nozzle.

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氧等离子体辅助室温键合制备SU-8聚合物微/纳米喷嘴

摘要电流体动力喷射（E-jet）印刷是一种按需增材制造方法，可以将各种功能材料直接沉积在目标基板上。许多理论和实验结果表明，E-jet具有水垢效应，减小喷嘴内径可以有效地提高打印分辨率。本文提出了一种利用氧等离子体辅助室温键合制备SU-8聚合物微/纳米喷嘴的方法。它可以防止由于粘合温度过高而导致的通道变形和堵塞。优化了硅纳米模具的表面改性参数，研究了热压参数对纳米图案复制精度的影响，分析了UV光刻参数对微通道和纳米通道的影响，揭示了氧等离子体处理参数与SU-8接触角的关系，讨论了键合压力对纳米通道形貌的影响，并深入分析了室温下的键合原理。该方法可以低成本、高精度地制备出SU-8聚合物微/纳米喷嘴，为实现室温键合制备SU-8聚合物喷嘴提供了新思路。

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来源期刊

Nanotechnology Reviews CHEMISTRY, MULTIDISCIPLINARY-NANOSCIENCE & NANOTECHNOLOGY

CiteScore

11.40

自引率

13.50%

发文量

137

审稿时长

7 weeks

期刊介绍： The bimonthly journal Nanotechnology Reviews provides a platform for scientists and engineers of all involved disciplines to exchange important recent research on fundamental as well as applied aspects. While expert reviews provide a state of the art assessment on a specific topic, research highlight contributions present most recent and novel findings. In addition to technical contributions, Nanotechnology Reviews publishes articles on implications of nanotechnology for society, environment, education, intellectual property, industry, and politics.