Preparation of ternary spin-coated thin films by mixing binary As-S and As-Se glass solutions

Abstract

We present comparison of spin-coated thin films prepared in traditional way from solution of dissolved bulk glass of particular ternary composition with films prepared from mixture of two separately dissolved binary bulk glasses targeting the same composition. The samples of five tie-line As-S-Se compositions ranging from As₃₃S₆₇ to As₃₃Se₆₇ were deposited in specular optical quality and thermal dependences of their optical properties, thickness, surface roughness, organic residual content, structure, and chemical resistance were studied. The deposited thin films were also structured by hot embossing at various temperatures to study the influence of source solution preparation on structuring process. Thin films prepared from solution mixtures show close physico-chemical properties to thin films prepared from solutions of corresponding bulk glasses.