{"title":"Vacuum metrology and its impact on research and industry","authors":"K. Jousten","doi":"10.1002/vipr.2023700114","DOIUrl":null,"url":null,"abstract":"By accurate vacuum measurement, it is possible to control processes in industry, to ensure the necessary environmental conditions for many experiments in science and research and to support the commercial relationship between manufacturers and users of vacuum equipment. The main task of vacuum metrology, the science of vacuum measurement, is to provide traceability of vacuum measurements to the SI. In recent years, also the characterization of vacuum by partial pressure analysis and outgassing rate measurement, and the dynamics of vacuum measurement became an issue for vacuum metrology.","PeriodicalId":42842,"journal":{"name":"Vakuum in Forschung und Praxis","volume":null,"pages":null},"PeriodicalIF":0.4000,"publicationDate":"2023-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vakuum in Forschung und Praxis","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/vipr.2023700114","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}
引用次数: 0
Abstract
By accurate vacuum measurement, it is possible to control processes in industry, to ensure the necessary environmental conditions for many experiments in science and research and to support the commercial relationship between manufacturers and users of vacuum equipment. The main task of vacuum metrology, the science of vacuum measurement, is to provide traceability of vacuum measurements to the SI. In recent years, also the characterization of vacuum by partial pressure analysis and outgassing rate measurement, and the dynamics of vacuum measurement became an issue for vacuum metrology.
期刊介绍：
VIP – Vakuum in Forschung und Praxis - Zeitschrift für Vakuumtechnologie, Oberflächen und Dünne Schichten ist die einzige Zeitschrift für alle Bereiche der Vakuumtechnologie und Dünnschichttechnik, die sich als Brücke und Bindeglied zwischen Wissenschaftlern, Praktikern und Anwendern aus Forschung, Entwicklung und Produktion versteht. Sie berichtet und informiert über neueste Entwicklungen und Erkenntnisse. VIP – Vakuum in Forschung und Praxis veröffentlicht u.a. - Übersichtsartikel - Fachaufsätze - referierte Beiträge aus der Forschung - Anwenderberichte - Produktinformationen - Interviews - Buchbesprechungen und -hinweise - Produkt- und Lieferantenverzeichnis
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