A New Environmentally Friendly Chemical Mechanical Polishing Method Applied for Surface Finishing Ti-6Al-4V Alloy

Abstract

A new eco-friendly slurry has been developed for the chemical mechanical polishing process with a solution of malic acid, deionized water, and an oxidizing agent hydrogen peroxide (H 2 O 2 ). The surface quality of Ti-6Al-4V workpieces with the proposed chemical mechanical polishing slurry with optimal parameters include oxidizers (H 2 O 2 ), colloidal (SiO 2 ) slurry, and deionized water by weight 8%, 45%, and 47% respectively, the pH concentration is adjusted 4 through the malic acid content present in the slurry. Experimental results obtained with the proposed chemical mechanical polishing method show a more improved surface quality than previous studies when applying for polishing Ti-6Al-4V alloy. The developed chemical mechanical polishing method's polishing results under optimal conditions obtain an ultra-fine surface quality with Ra = 0.696 nm over a measuring area of 53×70 μm 2 . X-ray photoelectron (XPS) and electrochemical measurements were used to study the chemical reaction mechanisms in the proposed chemical mechanical polishing process. The chemical mechanical polishing processes for the surface of the Ti-6Al-4V alloy workpiece with the H 2 O 2 oxidizing agent showed high suitability with the reactants formed on the surface such as Ti, V, and Al oxide. With the proposed oxidant and the established chemical mechanical polishing slurry, the feasibility and surface quality of the super smooth Ti-6Al-4V workpiece formed after polishing were demonstrated. The established chemical mechanical polishing method shows high applicability in environmental protection and Ti-6Al-4V alloy ultra-precision machining industries.