{"title":"An integrated sensor for pressure, temperature, and relative humidity based on MEMS technology","authors":"J. Won, S. Choa, Zhao Yulong","doi":"10.1007/BF02916481","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":16235,"journal":{"name":"Journal of Mechanical Science and Technology","volume":"20 1","pages":"505-512"},"PeriodicalIF":1.7000,"publicationDate":"2006-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1007/BF02916481","citationCount":"10","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Mechanical Science and Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1007/BF02916481","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, MECHANICAL","Score":null,"Total":0}
期刊介绍：
The aim of the Journal of Mechanical Science and Technology is to provide an international forum for the publication and dissemination of original work that contributes to the understanding of the main and related disciplines of mechanical engineering, either empirical or theoretical. The Journal covers the whole spectrum of mechanical engineering, which includes, but is not limited to, Materials and Design Engineering, Production Engineering and Fusion Technology, Dynamics, Vibration and Control, Thermal Engineering and Fluids Engineering.
Manuscripts may fall into several categories including full articles, solicited reviews or commentary, and unsolicited reviews or commentary related to the core of mechanical engineering.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
