{"title":"A bright pulsed x-ray source for soft x-ray research and processing applications","authors":"J.S. Pearlman, J.C. Riordan, A.C. Kolb","doi":"10.1016/0146-5724(85)90151-7","DOIUrl":null,"url":null,"abstract":"<div><p>Recent developments in soft X-ray technology open new possibilities in areas such as surface processing and microscopic examinations of both biological tissues and thin films. These developments, along with the development of a compact, bright laboratory soft X-ray source, make it possible to use soft X-ray technology in individual laboratories and processing facilities. The most promising sources for laboratory applications are baseed on magnetic compression of a gas discharge. Magnetic compression creates a hot dense plasma which is an intense source of soft X-rays in the 100 to 3000 eV range. Applications demonstrated at Maxwell and elsewhere include X-ray lithography, X-ray microscopy, surface annealing, X-ray diffraction and EXAFS.</p></div>","PeriodicalId":101054,"journal":{"name":"Radiation Physics and Chemistry (1977)","volume":"25 4","pages":"Pages 709-718"},"PeriodicalIF":0.0000,"publicationDate":"1985-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0146-5724(85)90151-7","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Radiation Physics and Chemistry (1977)","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0146572485901517","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
Recent developments in soft X-ray technology open new possibilities in areas such as surface processing and microscopic examinations of both biological tissues and thin films. These developments, along with the development of a compact, bright laboratory soft X-ray source, make it possible to use soft X-ray technology in individual laboratories and processing facilities. The most promising sources for laboratory applications are baseed on magnetic compression of a gas discharge. Magnetic compression creates a hot dense plasma which is an intense source of soft X-rays in the 100 to 3000 eV range. Applications demonstrated at Maxwell and elsewhere include X-ray lithography, X-ray microscopy, surface annealing, X-ray diffraction and EXAFS.
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