Z. Fang, Ni Yao, Min Wang, Jintian Lin, Jianhao Zhang, Rongbo Wu, L. Qiao, W. Fang, T. Lu, Ya Cheng
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引用次数: 10
Abstract
ABSTRACT We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-µm diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 × 105 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.
期刊介绍：
International Journal of Optomechatronics publishes the latest results of multidisciplinary research at the crossroads between optics, mechanics, fluidics and electronics.
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Optomechatronics systems in bio- and medical technologies (such as optical coherence tomography (OCT) systems or endoscopes and optical based medical instruments)
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