{"title":"Electron inelastic mean free paths in compounds","authors":"S. Tanuma, H. Shinotsuka, C. Powell, D. R. Penn","doi":"10.1384/jsa.26.106","DOIUrl":null,"url":null,"abstract":"We have calculated inelastic mean free paths (IMFPs) for 45 compounds for electron energies over the 50 eV to 200 keV range with the full Penn algorithm from the energy-loss functions of the compounds. Our calculated IMFPs could be fitted to a modified form of the relativistic Bethe equation for inelastic scattering in matter for energies from 50 eV to 200 keV. The average root-mean-square deviation in these fits was 0.60 %. The IMFPs were also compared with a relativistic version of our predictive Tanuma-Powell-Penn (TPP-2M) equation.","PeriodicalId":90628,"journal":{"name":"Journal of surface analysis (Online)","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2019-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of surface analysis (Online)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1384/jsa.26.106","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
We have calculated inelastic mean free paths (IMFPs) for 45 compounds for electron energies over the 50 eV to 200 keV range with the full Penn algorithm from the energy-loss functions of the compounds. Our calculated IMFPs could be fitted to a modified form of the relativistic Bethe equation for inelastic scattering in matter for energies from 50 eV to 200 keV. The average root-mean-square deviation in these fits was 0.60 %. The IMFPs were also compared with a relativistic version of our predictive Tanuma-Powell-Penn (TPP-2M) equation.
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