{"title":"Development of Atmospheric Pressure MeV-SIMS and Solid–Liquid Interface Analysis","authors":"T. Seki","doi":"10.1384/JSA.26.254","DOIUrl":null,"url":null,"abstract":"MeV-SIMS of for long we show the results of continuous SIMS measurement of benzoic acid solution on a Si substrate in a wet He environment for solid-liquid interface analysis.","PeriodicalId":90628,"journal":{"name":"Journal of surface analysis (Online)","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of surface analysis (Online)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1384/JSA.26.254","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
MeV-SIMS of for long we show the results of continuous SIMS measurement of benzoic acid solution on a Si substrate in a wet He environment for solid-liquid interface analysis.
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