Multiple Al micro materials fabrication by utilising electromigration

Abstract

Electromigration (EM) is a phenomenon of metallic atom diffusion due to high current density and is known to be a serious problem in reliability issues of electronic devices. On the other hand, fabrication method of nano/micro materials such as wire, belt, sphere and tube has been reported by utilising and controlling EM effectively. In this study, new sample patterns to fabricate two aluminium (Al) micro materials simultaneously by utilising EM are examined as the beginning of fabricating a large amount of micro materials. In some cases, two Al micro wires were successfully achieved. Evaluation of sample patterns to apply to fabricate such amount of micro materials is also studied.