Effect of substrate temperature on mechanical properties of SiCO thin film

Miao Zhang, N. Liao, Jie Shen, W. Xue
{"title":"Effect of substrate temperature on mechanical properties of SiCO thin film","authors":"Miao Zhang, N. Liao, Jie Shen, W. Xue","doi":"10.1504/ijmsi.2015.071115","DOIUrl":null,"url":null,"abstract":"In this study, unbalanced magnetron sputtering approach was used to prepare silicon oxycarbide (SiCO) ceramics in the form of thin film. The SiCO thin films were synthesised by reactive radio-frequency sputtering with a SiC target and oxygen gas. Nano-indentation and scratch test were used to study the mechanical properties of SiCO film at different substrate temperatures. An optimal temperature was proposed by analysing Young's modulus, surface roughness and adhesion strength.","PeriodicalId":39035,"journal":{"name":"International Journal of Materials and Structural Integrity","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2015-08-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1504/ijmsi.2015.071115","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Materials and Structural Integrity","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1504/ijmsi.2015.071115","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Engineering","Score":null,"Total":0}
引用次数: 0

Abstract

In this study, unbalanced magnetron sputtering approach was used to prepare silicon oxycarbide (SiCO) ceramics in the form of thin film. The SiCO thin films were synthesised by reactive radio-frequency sputtering with a SiC target and oxygen gas. Nano-indentation and scratch test were used to study the mechanical properties of SiCO film at different substrate temperatures. An optimal temperature was proposed by analysing Young's modulus, surface roughness and adhesion strength.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
衬底温度对SiCO薄膜力学性能的影响
本研究采用非平衡磁控溅射法制备了薄膜形式的氧化碳化硅(SiCO)陶瓷。采用反应性射频溅射法制备了SiC靶材和氧气。采用纳米压痕和划痕试验研究了SiCO薄膜在不同衬底温度下的力学性能。通过分析杨氏模量、表面粗糙度和粘接强度,提出了最佳温度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
CiteScore
0.40
自引率
0.00%
发文量
0
期刊最新文献
Compressive strength enhancement of concrete using fly ash as a partial replacement of fine aggregate and model development Flexural fatigue analysis of fibre reinforced polymer concrete composites under non-reversed loading A new simple formulation for instantaneous coil diameter of a SMA helical spring Effects of two-step heat treatment on the structure of cotton-derived activated carbon fibres Mechanics of contact interaction and deformation of main pipelines in the conditions of extreme external actions
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1