{"title":"Effect of acidic/alkalinity slurry on titanium alloy CMP performance under different rotation speed condition","authors":"Minghua Pang, Lijie Ma, Jianxiu Su, Zhankui Wang","doi":"10.1504/ijat.2020.10032189","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":39039,"journal":{"name":"International Journal of Abrasive Technology","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Abrasive Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1504/ijat.2020.10032189","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Engineering","Score":null,"Total":0}
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