Thermodynamics, kinetics, and technology of synthesis of epitaxial layers of silicon carbide on silicon by coordinated substitution of atoms, and its unique properties. A review
{"title":"Thermodynamics, kinetics, and technology of synthesis of epitaxial layers of silicon carbide on silicon by coordinated substitution of atoms, and its unique properties. A review","authors":"S. Kukushkin, A. Osipov","doi":"10.17308/kcmf.2022.24/10549","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":52328,"journal":{"name":"Kondensirovannye Sredy Mezhfaznye Granitsy","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2022-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Kondensirovannye Sredy Mezhfaznye Granitsy","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.17308/kcmf.2022.24/10549","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Materials Science","Score":null,"Total":0}
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