Electrostatic Control and Air Ionization in Cleanrooms for Semiconductor and TFT Production

Abstract

The most critical manufacturing processes for integrated circuits and thin-film transistors, mainstays of the semiconductor industry, take place in cleanrooms. The strictly controlled temperature and humidity in cleanrooms enable electrostatic charges to be generated and maintained on the surface of objects for an extended time. Electrostatic charge and discharge cause particle contamination, damage to products, and electromagnetic interference, which can lead to production tool lockup. With the development of new manufacturing technologies, products are becoming more sensitive to electrostatic discharge. How to control electrostatic charge and eliminate associated problems has become a challenge in the high-tech semiconductor industry.