Structure and Soft Magnetic Properties of Fe-Ti-M (M=Al,Si,Co) Ternary Films

IEEE Translation Journal on Magnetics in Japan Pub Date : 1994-07-01 DOI:10.1109/TJMJ.1994.4565900

N. Aoyama;F. Sato;Y. Fujino;T. Miyazaki

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引用次数: 1

Abstract

The magnetic and structural properties of sputtered Fe-Al-Ti, Fe-Si-Ti and Fe-Co-Ti ternary films were investigated. Samples were annealed at 673K for one hour. Crystal structures were bcc for the Fe-Si-Ti and Fe-Co-Ti ternary films, and a mixture of bcc and bcc+Fe ₂ Ti for the Fe-Al-Ti ternary films. The addition of Ti reduces &3x001F5;rain sizes to a minimum of about 10 nm. Addition of Al, Si or Ti to Fe reduces the saturation magnetic flux density of Fe-Al-Ti and Fe-Si-Ti films, and addition of Co increases the saturation magnetic flux density of Fe-Co-Ti. Zero-magnetostriction samples were obtained in each ternary system. Low coercivity (under 5 Oe) and high initial permeability (about 1000) were obtained together with zero magnetostriction for Fe-Al-Ti ternary films by adding a small amount of Ti. In the case of Fe-Co-Ti ternary films, low coercivity and high permeability were obtained along with small grain sizes of 10 nm or so. Films with low magnetostriction (λ _s ≪3×10 ^-6 ) had a coercivity roughly proportional to the third power of the grain diameter.

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Fe-Ti-M（M=Al，Si，Co）三元薄膜的结构与软磁性能

研究了溅射Fe-Al-Ti、Fe-Si-Ti和Fe-Co-Ti三元薄膜的磁性和结构性能。样品在673K下退火1小时。Fe-Si-Ti和Fe-Co-Ti三元薄膜的晶体结构为bcc，Fe-Al-Ti三三元薄膜为bcc和bcc+Fe2Ti的混合物。Ti的加入减少了&3x001F5；雨的大小最小为约10nm。向Fe中添加Al、Si或Ti降低了Fe-Al-Ti和Fe-Si-Ti膜的饱和磁通密度，而添加Co增加了Fe-Co-Ti的饱和磁通强度。在每个三元体系中都获得了零磁致伸缩样品。Fe-Al-Ti三元薄膜通过添加少量Ti，获得了低矫顽力（5Oe以下）和高初始磁导率（约1000），同时零磁致伸缩。在Fe-Co-Ti三三元薄膜的情况下，获得了小晶粒尺寸（10nm左右）的低矫顽磁力和高磁导率。具有低磁致伸缩性（λs≪3×10-6）的薄膜具有与晶粒直径的三次方大致成比例的矫顽力。

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IEEE Translation Journal on Magnetics in Japan

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