{"title":"Fe-N Thin Films Prepared by Excimer Laser Ablation","authors":"T. Yoshitake;M. Ohkoshi;K. Tsushima","doi":"10.1109/TJMJ.1994.4565972","DOIUrl":null,"url":null,"abstract":"Fe-N films were deposited on glass substrates at room temperature using a pulsed KrF excimer laser (wavelength 248 nm, pulse width 27 ns). The film composition and structure depend on the ambient N\n<sub>2</sub>\n pressure, the laser pulse energy, and the repetition rate. In order to understand the interaction between light-emitting ablated particles produced by excimer laser ablation of Fe and ambient N\n<sub>2</sub>\n gas, the dynamics of ablated plumes were investigated by means of a high-speed framing streak camera and time-resolved emission spectroscopy. Two distinct components of ablated particles were observed. One consisted of a spherical plume with an average velocity of over 100 km/s, which was observed for about 300 ns from the laser irradiation. The other consisted of a columnar plume with a maximum velocity of 22 km/s, which was observed for 1 to 10 μs. The velocity of the Fe radicals depends on the N\n<sub>2</sub>\n pressure, which contributes to formation of the Fe-N film.","PeriodicalId":100647,"journal":{"name":"IEEE Translation Journal on Magnetics in Japan","volume":"9 6","pages":"146-152"},"PeriodicalIF":0.0000,"publicationDate":"1994-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1109/TJMJ.1994.4565972","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Translation Journal on Magnetics in Japan","FirstCategoryId":"1085","ListUrlMain":"https://ieeexplore.ieee.org/document/4565972/","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
Fe-N films were deposited on glass substrates at room temperature using a pulsed KrF excimer laser (wavelength 248 nm, pulse width 27 ns). The film composition and structure depend on the ambient N
2
pressure, the laser pulse energy, and the repetition rate. In order to understand the interaction between light-emitting ablated particles produced by excimer laser ablation of Fe and ambient N
2
gas, the dynamics of ablated plumes were investigated by means of a high-speed framing streak camera and time-resolved emission spectroscopy. Two distinct components of ablated particles were observed. One consisted of a spherical plume with an average velocity of over 100 km/s, which was observed for about 300 ns from the laser irradiation. The other consisted of a columnar plume with a maximum velocity of 22 km/s, which was observed for 1 to 10 μs. The velocity of the Fe radicals depends on the N
2
pressure, which contributes to formation of the Fe-N film.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
