A Technique for Measuring Thin-Film Inductors Driven at High Flux Densities

Abstract

This paper discusses the basic properties of thin-film inductors driven at high flux densities. We made inner-coil-type thin-film inductors, each with either a closed or an open magnetic circuit, and developed a technique for measuring the impedance of the inductors at high flux densities. We used this technique to reduce the multiple voltage reflections between amplifier and inductor. The impedance of the magnetic thin-film inductors varied according to the magnetic field intensity, because of flux saturation.