{"title":"Modeling and Optimization of CMOS Compatible Various ZnO/SiO2/Si Multilayer Structure for SAW Devices Using FEM","authors":"P. R. Bagade, A. Pawar, R. K. Kamat, S. A. Shinde","doi":"10.21272/jnep.15(1).01024","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":16654,"journal":{"name":"Journal of Nano-and electronic Physics","volume":"1 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Nano-and electronic Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.21272/jnep.15(1).01024","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"Physics and Astronomy","Score":null,"Total":0}
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