Modeling of a Schottky Diode in CMOS Process with a Flexible “Open-Through” On-Chip De-embedding Method

IF 5.2 1区 计算机科学 Q1 COMPUTER SCIENCE, INFORMATION SYSTEMS Tsinghua Science and Technology Pub Date : 2011-04-01 DOI:10.1016/S1007-0214(11)70027-X
Xuguang Sun (孙旭光), Chun Zhang (张 春), Lili Gao (高立力), Yongming Li (李永明), Zhihua Wang (王志华)
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引用次数: 3

Abstract

Modeling of Schottky diodes in the CMOS process is a key step in ultra-high frequency (UHF) radio frequency identification (RFID) transponder designs. Accurate Schottky diode models need both DC and RF models. Conventional DC models of the Schottky diode fail to predict the forward leakage current, which is crucial for precise simulation results. This paper presents a Schottky diode model with an additional diode which gives the correct forward leakage current. The RF model of the Schottky diode is constructed based on the measured S-parameters. Then, an on-chip de-embedding process is needed to remove the parasitics due to the pads and interconnection lines in the S-parameter test. A flexible “open-through” on-chip de-embedding method is proposed which only requires an “open” dummy and a “through” dummy, with all the lumped and distributed parasitics equivalent to two-port networks to give sufficient high-frequency de-embedding accuracy. By the help of this de-embedding method and the new DC model, the accuracy of the established diode model could be guaranteed. The Schottky diode model is verified by comparison between measurements and simulations and successfully applied to an RFID transponder design.

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采用柔性“开通”片上反嵌入方法的肖特基二极管CMOS工艺建模
肖特基二极管的CMOS工艺建模是超高频(UHF)射频识别(RFID)应答器设计的关键步骤。精确的肖特基二极管模型需要直流和射频模型。传统的肖特基二极管直流模型不能准确预测正向泄漏电流,这对精确的模拟结果至关重要。本文提出了一个肖特基二极管模型,外加一个二极管可以给出正确的正向漏电流。基于测量到的s参数,建立了肖特基二极管的射频模型。然后,在s参数测试中,需要进行片上去嵌入工艺来去除由于衬垫和互连线造成的寄生。提出了一种灵活的“通开”片上去嵌入方法,该方法只需要一个“通开”假人和一个“通开”假人,所有的集总寄生和分布寄生等效于双端口网络,以获得足够的高频去嵌入精度。利用这种去嵌入方法和新的直流模型,可以保证所建立的二极管模型的精度。肖特基二极管模型通过测量和仿真的比较验证,并成功应用于RFID应答器设计。
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2340
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