{"title":"Cross section sets and transport parameters for Ar+ ions in CF4 gas","authors":"Z. Nikitovic, Z. Raspopovic","doi":"10.2298/sos230326038n","DOIUrl":null,"url":null,"abstract":"Understanding plasma distribution, characteristics and phenomena is important for the development and optimization of semiconductor device manufacturing plasma equipment, such as etching and deposition tools. For this reason, plasma simulation is currently being utilized at every stage of equipment design, development and improvement. The cross section sets obtained by applying Denpoh-Nanbu theory to Ar+ on CF4 collisions were found to be in general qualitative and in part quantitative agreement with data from the literature. The Monte Carlo technique was applied to perform calculations of transport parameters. Calculated cross sections can be used to obtain transport coefficients, specially drift velocity, characteristic energy, reduced mobility, longitudinal diffusion and rate coefficients for low and moderate reduced electric fields E/N (E-electric field strength; N-gas density) and accounting for the non-conservative collisions.","PeriodicalId":21592,"journal":{"name":"Science of Sintering","volume":"1 1","pages":""},"PeriodicalIF":1.4000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Science of Sintering","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.2298/sos230326038n","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"MATERIALS SCIENCE, CERAMICS","Score":null,"Total":0}
引用次数: 0
Abstract
Understanding plasma distribution, characteristics and phenomena is important for the development and optimization of semiconductor device manufacturing plasma equipment, such as etching and deposition tools. For this reason, plasma simulation is currently being utilized at every stage of equipment design, development and improvement. The cross section sets obtained by applying Denpoh-Nanbu theory to Ar+ on CF4 collisions were found to be in general qualitative and in part quantitative agreement with data from the literature. The Monte Carlo technique was applied to perform calculations of transport parameters. Calculated cross sections can be used to obtain transport coefficients, specially drift velocity, characteristic energy, reduced mobility, longitudinal diffusion and rate coefficients for low and moderate reduced electric fields E/N (E-electric field strength; N-gas density) and accounting for the non-conservative collisions.
期刊介绍：
Science of Sintering is a unique journal in the field of science and technology of sintering.
Science of Sintering publishes papers on all aspects of theoretical and experimental studies, which can contribute to the better understanding of the behavior of powders and similar materials during consolidation processes. Emphasis is laid on those aspects of the science of materials that are concerned with the thermodynamics, kinetics and mechanism of sintering and related processes. In accordance with the significance of disperse materials for the sintering technology, papers dealing with the question of ultradisperse powders, tribochemical activation and catalysis are also published.
Science of Sintering journal is published four times a year.
Types of contribution: Original research papers, Review articles, Letters to Editor, Book reviews.
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