Magnetic properties of cobalt microwires measured by piezoresistive cantilever magnetometry

Abstract

Abstract We present the magnetic characterization of cobalt wires grown by focused electron beam-induced deposition (FEBID) and studied using static piezoresistive cantilever magnetometry. We have used previously developed high force sensitive submicron-thick silicon piezoresistive cantilevers. High quality polycrystalline cobalt microwires have been grown by FEBID onto the free end of the cantilevers using dual beam equipment. In the presence of an external magnetic field, the magnetic cobalt wires become magnetized, which leads to the magnetic field dependent static deflection of the cantilevers. We show that the piezoresistive signal from the cantilevers, corresponding to a maximum force of about 1 nN, can be measured as a function of the applied magnetic field with a good signal to noise ratio at room temperature. The results highlight the flexibility of the FEBID technique for the growth of magnetic structures on specific substrates, in this case piezoresistive cantilevers.