付秀华 Fu Xiuhua, 刘俊岐 Liu Junqi, 李卓霖 LI Zhuolin, 刘海成 Liu Haicheng, 任海峰 REN Haifeng, 王一礴 Wang Yibo, 韩克旭 Han Kexu
{"title":"大口径超薄基板双面溅射膜厚均匀性研究","authors":"付秀华 Fu Xiuhua, 刘俊岐 Liu Junqi, 李卓霖 LI Zhuolin, 刘海成 Liu Haicheng, 任海峰 REN Haifeng, 王一礴 Wang Yibo, 韩克旭 Han Kexu","doi":"10.3788/gzxb20235206.0631001","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":7111,"journal":{"name":"光子学报","volume":"1 1","pages":""},"PeriodicalIF":0.6000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"光子学报","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.3788/gzxb20235206.0631001","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"OPTICS","Score":null,"Total":0}
期刊介绍:
Acta Photonica Sinica is a monthly journal which is sponsored and edited by The Chinese Optical Society, co-sponsored by Xi"an Institute of Optics and Precision Mechanics, CAS, and published by Science Press. It mainly publishes the academic thesis, the research note, the research letter on Photonics. The contents of the Acta deal with Optics, particularly, Transient Optics, Optoelectronics, Integrated Optics, Information Optics, Guided Wave Optics, Nonlinear Optics, Photo-Biology, Optical Communication, Optical Sensing, Optical Computing, Optical Neural Network, High Speed Photography, Intellectualized Optical Instrument, Photon Function Materials, Interaction between Photons, Classical and Nonclassical effects of Photons, etc.