V. D. Shinkarev, D. V. Lukyanenko, A. V. Tikhonravov, A. G. Yagola
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引用次数: 0
Abstract
We consider an algorithm for monitoring the process of sputter deposition of optical
coatings based on the analysis of sample data of broadband measurements for a fixed set of
wavelengths. On the one hand, the considered algorithm uses broadband measurement data,
which is an advantage compared to using only monochromatic measurement data for one fixed
wavelength, and on the other hand, it is fast compared to algorithms that use complete broadband
measurement data. It has been demonstrated that the proposed algorithm allows one to obtain
fairly accurate estimates of the layer thicknesses in deposited multilayer optical coatings.
期刊介绍：
Journal of Applied and Industrial Mathematics is a journal that publishes original and review articles containing theoretical results and those of interest for applications in various branches of industry. The journal topics include the qualitative theory of differential equations in application to mechanics, physics, chemistry, biology, technical and natural processes; mathematical modeling in mechanics, physics, engineering, chemistry, biology, ecology, medicine, etc.; control theory; discrete optimization; discrete structures and extremum problems; combinatorics; control and reliability of discrete circuits; mathematical programming; mathematical models and methods for making optimal decisions; models of theory of scheduling, location and replacement of equipment; modeling the control processes; development and analysis of algorithms; synthesis and complexity of control systems; automata theory; graph theory; game theory and its applications; coding theory; scheduling theory; and theory of circuits.
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