{"title":"Ferromagnetic RF inductors and transformers for standard CMOS/BiCMOS","authors":"Y. Zhuang, M. Vroubel, B. Rejaei, J. Burghartz","doi":"10.1109/IEDM.2002.1175882","DOIUrl":null,"url":null,"abstract":"Integrated solenoidal radio-frequency (RF) inductors and transformers with a ferromagnetic core are demonstrated by using a fully IC-compatible fabrication process. For a 500-nm-thick Ni/sub 80/Fe/sub 20/ film, a cut-off frequency of over 7.5 GHz for a 2.5-nH inductor is realized. Optimum inductor design based on tailored inductance, quality factor, and cut-off frequency is discussed. RF transformers realized have a coupling factor of /spl sim/70% up to 200 MHz.","PeriodicalId":74909,"journal":{"name":"Technical digest. International Electron Devices Meeting","volume":"12 3","pages":"475-478"},"PeriodicalIF":0.0000,"publicationDate":"2002-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1109/IEDM.2002.1175882","citationCount":"45","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Technical digest. International Electron Devices Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDM.2002.1175882","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 45
Abstract
Integrated solenoidal radio-frequency (RF) inductors and transformers with a ferromagnetic core are demonstrated by using a fully IC-compatible fabrication process. For a 500-nm-thick Ni/sub 80/Fe/sub 20/ film, a cut-off frequency of over 7.5 GHz for a 2.5-nH inductor is realized. Optimum inductor design based on tailored inductance, quality factor, and cut-off frequency is discussed. RF transformers realized have a coupling factor of /spl sim/70% up to 200 MHz.
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