M. Nagaraju, S. Sridaran, Andrew Lingley, J. Larson, B. Otis, R. Ruby
{"title":"Comparison of acoustic wave pressure sensors for TPMS applications","authors":"M. Nagaraju, S. Sridaran, Andrew Lingley, J. Larson, B. Otis, R. Ruby","doi":"10.1109/FCS.2015.7138824","DOIUrl":null,"url":null,"abstract":"We study and compare the pressure sensitivities of different area Rayleigh Lamb wave (RL) mode (S1 mode) and FBAR resonators. The studied RL-mode and FBAR resonators operate at 785MHz and 628MHz respectively. The resonators are fabricated on a released membrane with AlN as the piezoelectric layer. The resonators are hermetically sealed and the manufacturing process uses standard micromachining techniques throughout. The devices exhibit a pressure sensitivity over a range of 15 - 80psi, suitable for Tire Pressure Monitoring Systems (TPMS). The sensitivities of different area resonators are compared.","PeriodicalId":57667,"journal":{"name":"时间频率公报","volume":"34 3","pages":"205-208"},"PeriodicalIF":0.0000,"publicationDate":"2015-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1109/FCS.2015.7138824","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"时间频率公报","FirstCategoryId":"1089","ListUrlMain":"https://doi.org/10.1109/FCS.2015.7138824","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
We study and compare the pressure sensitivities of different area Rayleigh Lamb wave (RL) mode (S1 mode) and FBAR resonators. The studied RL-mode and FBAR resonators operate at 785MHz and 628MHz respectively. The resonators are fabricated on a released membrane with AlN as the piezoelectric layer. The resonators are hermetically sealed and the manufacturing process uses standard micromachining techniques throughout. The devices exhibit a pressure sensitivity over a range of 15 - 80psi, suitable for Tire Pressure Monitoring Systems (TPMS). The sensitivities of different area resonators are compared.
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