{"title":"P1I-3 FBAR Multi-Layer Resonator for Remote Identification","authors":"V. I. Cherednick","doi":"10.1109/ULTSYM.2007.362","DOIUrl":null,"url":null,"abstract":"Frequency spectra of multi-layer Al-AlN FBAR resonator are calculated. It is shown, that plurality of frequency spectra can be obtained by various combinations of quantities of layers and their thickness. Each spectrum is individual and can be used for remote identification similar to SAW tags.","PeriodicalId":6355,"journal":{"name":"2007 IEEE Ultrasonics Symposium Proceedings","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2007-12-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE Ultrasonics Symposium Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2007.362","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Frequency spectra of multi-layer Al-AlN FBAR resonator are calculated. It is shown, that plurality of frequency spectra can be obtained by various combinations of quantities of layers and their thickness. Each spectrum is individual and can be used for remote identification similar to SAW tags.
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