Non-contact and automatic test of micro-size work-piece

Shuhua Jiang
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Abstract

A test system with the CCD matrix and computer is researched to realize 2-D non-contact and automatic measurement. Micro-size rectangle work-piece is tested as example. The experiments show that the absolute precision is less than 3 μm. The instrument possesses the high accuracy and good repeatability, the system may be used in the product line and makes on line testing possible.
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微尺寸工件的非接触式自动检测
研究了一种基于CCD矩阵和计算机的二维非接触自动测量系统。以微尺寸矩形工件为例进行了试验。实验结果表明,该方法的绝对精度小于3 μm。该仪器精度高,重复性好,可用于生产线,实现在线测试。
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