Design and fabrication of a λ/4 phase-shifted 1310 nm laterally-coupled distributed-feedback laser

R. Millett, H. Awad, M. Poirier, V. Tolstikhin, T. Hall, K. Hinzer, H. Schriemer
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引用次数: 9

Abstract

We describe the design and fabrication of a lambda/4 phase-shifted laterally-coupled distributed-feedback laser. The third-order grating for distributed-feedback is fabricated without regrowth using stepper lithography, a process that is amenable to high-yield, low-cost manufacturing.
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λ/4相移1310nm横向耦合分布反馈激光器的设计与制造
我们描述了一个λ /4相移横向耦合分布反馈激光器的设计和制造。分布式反馈的三阶光栅采用步进光刻技术制造,无需再生,这是一种适合高产量,低成本制造的工艺。
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