{"title":"Méthode de détermination des épaisseurs de films conducteurs par mesures de résistance de surface","authors":"Frédéric Voiron, Xavier Federspiel, Michel Ignat","doi":"10.1016/S1287-4620(00)88525-7","DOIUrl":null,"url":null,"abstract":"<div><p>To evaluate the thickness of the layers of a Ti/TiAl<sub>3</sub>/Al system, experiments based on surface resistance measurements have been performed. The thickness of each layer is deduced from a comparison among calculated and measured values of resistance. We present here a solution for the simulation of surface resistance and the results obtained with this method on Ti/TiAl<sub>3</sub>/Al systems.</p></div>","PeriodicalId":100303,"journal":{"name":"Comptes Rendus de l'Académie des Sciences - Series IIB - Mechanics-Physics-Astronomy","volume":"327 11","pages":"Pages 1197-1200"},"PeriodicalIF":0.0000,"publicationDate":"1999-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/S1287-4620(00)88525-7","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Comptes Rendus de l'Académie des Sciences - Series IIB - Mechanics-Physics-Astronomy","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1287462000885257","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
To evaluate the thickness of the layers of a Ti/TiAl3/Al system, experiments based on surface resistance measurements have been performed. The thickness of each layer is deduced from a comparison among calculated and measured values of resistance. We present here a solution for the simulation of surface resistance and the results obtained with this method on Ti/TiAl3/Al systems.
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