{"title":"Fault classification and timing prediction based on shipment inspection data and maintenance reports for semiconductor manufacturing equipment","authors":"Euisuk Chung, Kyoungchan Park, Pilsung Kang","doi":"10.2139/ssrn.4145473","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":10663,"journal":{"name":"Comput. Ind. Eng.","volume":"52 1","pages":"108972"},"PeriodicalIF":0.0000,"publicationDate":"2023-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Comput. Ind. Eng.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2139/ssrn.4145473","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
