Production of nanopowders from physical vapor deposited films on nonmetallic substrates by conjunctional freezing-assisted ultrasonic extraction method
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引用次数: 7
Abstract
A new technique to extract nanoscale powders from thin films deposited by a physical vapor deposition method on nonmetallic substrates is proposed. Powders were extracted from films of different materials, such as silicon, nickel, copper, iron, aluminum and cobalt, and compounds, such as aluminum nitride, aluminum oxide, copper oxide, iron oxide, nickel cobaltite, nickel ferrite, nickel oxide, silicon carbide, silicon nitride and silicon oxide. These thin films were deposited on glass substrates by magnetron sputtering, pulsed-laser deposition, spray pyrolysis or thermal evaporation, and the particle sizes of the extracted powders were comparable to those of film samples. This technique is fast, low cost, reliable, highly clean and appropriate for large-scale samples.
期刊介绍:
Proceedings of the Institution of Mechanical Engineers Part N-Journal of Nanomaterials Nanoengineering and Nanosystems is a peer-reviewed scientific journal published since 2004 by SAGE Publications on behalf of the Institution of Mechanical Engineers. The journal focuses on research in the field of nanoengineering, nanoscience and nanotechnology and aims to publish high quality academic papers in this field. In addition, the journal is indexed in several reputable academic databases and abstracting services, including Scopus, Compendex, and CSA's Advanced Polymers Abstracts, Composites Industry Abstracts, and Earthquake Engineering Abstracts.