Production of nanopowders from physical vapor deposited films on nonmetallic substrates by conjunctional freezing-assisted ultrasonic extraction method

O. Hammadi
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引用次数: 7

Abstract

A new technique to extract nanoscale powders from thin films deposited by a physical vapor deposition method on nonmetallic substrates is proposed. Powders were extracted from films of different materials, such as silicon, nickel, copper, iron, aluminum and cobalt, and compounds, such as aluminum nitride, aluminum oxide, copper oxide, iron oxide, nickel cobaltite, nickel ferrite, nickel oxide, silicon carbide, silicon nitride and silicon oxide. These thin films were deposited on glass substrates by magnetron sputtering, pulsed-laser deposition, spray pyrolysis or thermal evaporation, and the particle sizes of the extracted powders were comparable to those of film samples. This technique is fast, low cost, reliable, highly clean and appropriate for large-scale samples.
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联合冷冻辅助超声萃取法制备非金属基板物理气相沉积膜纳米粉体
提出了一种从非金属基底上物理气相沉积的薄膜中提取纳米级粉末的新技术。从不同材料(如硅、镍、铜、铁、铝、钴)和化合物(如氮化铝、氧化铝、氧化铜、氧化铁、钴酸镍、铁酸镍、氧化镍、碳化硅、氮化硅和氧化硅)的薄膜中提取粉末。这些薄膜通过磁控溅射、脉冲激光沉积、喷雾热解或热蒸发等方法沉积在玻璃基底上,提取的粉末粒度与薄膜样品相当。该技术快速、低成本、可靠、高度清洁,适用于大规模样品。
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来源期刊
CiteScore
6.00
自引率
1.70%
发文量
24
期刊介绍: Proceedings of the Institution of Mechanical Engineers Part N-Journal of Nanomaterials Nanoengineering and Nanosystems is a peer-reviewed scientific journal published since 2004 by SAGE Publications on behalf of the Institution of Mechanical Engineers. The journal focuses on research in the field of nanoengineering, nanoscience and nanotechnology and aims to publish high quality academic papers in this field. In addition, the journal is indexed in several reputable academic databases and abstracting services, including Scopus, Compendex, and CSA's Advanced Polymers Abstracts, Composites Industry Abstracts, and Earthquake Engineering Abstracts.
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