S. Oleum, A. Atalar, H. Koymen, K. Oguz, M. N. Senlik
{"title":"P4M-3 Experimental Characterization of Capacitive Micromachined Ultrasonic Transducers","authors":"S. Oleum, A. Atalar, H. Koymen, K. Oguz, M. N. Senlik","doi":"10.1109/ULTSYM.2007.536","DOIUrl":null,"url":null,"abstract":"In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micro- machining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.","PeriodicalId":6355,"journal":{"name":"2007 IEEE Ultrasonics Symposium Proceedings","volume":"78 1","pages":"2131-2134"},"PeriodicalIF":0.0000,"publicationDate":"2007-12-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE Ultrasonics Symposium Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2007.536","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micro- machining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.
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