Sintering BFO targets for sputtering

G. Orr, A. Goryachev, G. Golan
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引用次数: 1

Abstract

Ceramic $BiFeO_{3}$ samples were prepared by rapid sintering at $880^OC$. Two compositions were examined. A $56/44\ Bi_{2}O_{3}/Fe_{2}O_{3}\ mole\%$ composition and a $56Bi_{2}O_{3}\cdot44Fe_{2}O_{3}+6.5wt\%\,NaCl$ composition. The samples were heat treated at different times up to $8$ minutes and the phase content was examined as a function of the time using XRD measurements and analysis. It was demonstrated that using both compositions, maximum $BiFeO_{3}$ phase content is obtained after $3.5$ minutes. In the former approximately $50\%$ of the material transformed to $BiFeO_{3}$ while in the latter $98.5\%$.
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烧结BFO溅射靶材
采用$880^OC$快速烧结法制备了$BiFeO_{3}$陶瓷样品。检查了两种成分。56/44美元\ Bi_ {2} O_ {3} / Fe_ {2} O_{3} \摩尔\ %组成和56美元Bi_ {2} O_ {3} \ cdot44Fe_ {2} O_ {3} + 6.5 wt % \ \,氯化钠组成。样品经过不同时间的热处理,最长可达8分钟,并使用XRD测量和分析来检测相含量作为时间的函数。结果表明,两种组合物均在3.5 min后得到最大的$BiFeO_{3}$相含量。在前者中,大约$ 50% $的材料转化为$BiFeO_{3}$,而在后者中$ 98.5% $。
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