{"title":"Challenges of 22 nm and beyond CMOS technology","authors":"Ru Huang, Hanming Wu, Jinfeng Kang, Deyuan Xiao, XueLong Shi, X. An, Yu Tian, Runsheng Wang, Liangliang Zhang, Xing Zhang, Yangyuan Wang","doi":"10.1007/s11432-009-0167-9","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":49124,"journal":{"name":"Science in China, Series F: Information Sciences","volume":"50 1","pages":"1491-1533"},"PeriodicalIF":0.0000,"publicationDate":"2009-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"43","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Science in China, Series F: Information Sciences","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s11432-009-0167-9","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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