{"title":"MEMS technology for RF passive components","authors":"J. Iannacci, A. Faes, B. Margesin","doi":"10.1145/2093698.2093778","DOIUrl":null,"url":null,"abstract":"In this work a wide overview on the exploitation of MEMS technology (MicroElectroMechanical-Systems) for Radio Frequency (i.e. RF-MEMS) and telecommunication systems is provided. In the last 10-15 years MEMS technology proved to be a valuable solution for the realization of passive components for RF circuits, like variable capacitors (i.e. varactors), inductors, switches (i.e. micro-relays), as well as more complex networks, like RF filters, impedance matching tuners etc., with remarkable characteristics in terms of low-loss, high Q-factor (quality factor), and large reconfigurability. The integration within RF circuits and platforms, of passive lumped elements and networks with such prominent characteristics, would lead to a significant increase of performance and reconfigurability of the whole system (e.g. mobile handset, satellite, radar, and so on).","PeriodicalId":91990,"journal":{"name":"... International Symposium on Applied Sciences in Biomedical and Communication Technologies. International Symposium on Applied Sciences in Biomedical and Communication Technologies","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2011-10-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"... International Symposium on Applied Sciences in Biomedical and Communication Technologies. International Symposium on Applied Sciences in Biomedical and Communication Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1145/2093698.2093778","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
In this work a wide overview on the exploitation of MEMS technology (MicroElectroMechanical-Systems) for Radio Frequency (i.e. RF-MEMS) and telecommunication systems is provided. In the last 10-15 years MEMS technology proved to be a valuable solution for the realization of passive components for RF circuits, like variable capacitors (i.e. varactors), inductors, switches (i.e. micro-relays), as well as more complex networks, like RF filters, impedance matching tuners etc., with remarkable characteristics in terms of low-loss, high Q-factor (quality factor), and large reconfigurability. The integration within RF circuits and platforms, of passive lumped elements and networks with such prominent characteristics, would lead to a significant increase of performance and reconfigurability of the whole system (e.g. mobile handset, satellite, radar, and so on).