{"title":"ArF Laser-Induced Fluence-Dependent Absorption of Calcium Fluoride Windows","authors":"Jue Wang, G. Cox, I. Balasa, L. Jensen","doi":"10.1364/FIO.2020.FTU2C.3","DOIUrl":null,"url":null,"abstract":"High throughput of microelectronic fabrication demands high performance CaF2 laser optics. Based on ArF laser-induced fluence-dependent absorption, we derived one-photon/two-photon absorption, and surface/subsurface absorption of CaF2 windows.","PeriodicalId":91683,"journal":{"name":"Frontiers in optics. Annual Meeting of the Optical Society of America","volume":"32 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2020-09-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Frontiers in optics. Annual Meeting of the Optical Society of America","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/FIO.2020.FTU2C.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
High throughput of microelectronic fabrication demands high performance CaF2 laser optics. Based on ArF laser-induced fluence-dependent absorption, we derived one-photon/two-photon absorption, and surface/subsurface absorption of CaF2 windows.
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