Wafer map defect pattern detection method based on improved attention mechanism
Shouhong Chen, Meiqi Liu, Xingna Hou, Ziren Zhu, Zhentao Huang, Tao Wang
{"title":"Wafer map defect pattern detection method based on improved attention mechanism","authors":"Shouhong Chen, Meiqi Liu, Xingna Hou, Ziren Zhu, Zhentao Huang, Tao Wang","doi":"10.2139/ssrn.4341589","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":12115,"journal":{"name":"Expert Syst. Appl.","volume":"52 1","pages":"120544"},"PeriodicalIF":0.0000,"publicationDate":"2023-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Expert Syst. Appl.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.2139/ssrn.4341589","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
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