Influence of oxygen on temperature and electron density of nitrogen microwave plasma

O. Komin, O. V. Pelipasov
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Abstract

The influence of the oxygen content in the range of 0,1-1,2% in the plasma-forming gas, nitrogen, on the characteristics of microwave plasma: temperature and electron density has been studied. The plasma temperature decreases from 4500 to 4390 K with increasing O content, and the electron density decreases from 1,16·10 to 0,85·10 cm.
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氧对氮微波等离子体温度和电子密度的影响
本文研究了等离子体形成气体氮中氧含量在0.1% ~ 1.2%范围内对微波等离子体温度和电子密度特性的影响。随着O含量的增加,等离子体温度从4500 K降低到4390 K,电子密度从1.16·10降低到0.85·10 cm。
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