Rapid calculation of the energy deposition profiles for processing of dielectrics with femtosecond lasers

A. R. Cruz, E. Grace, Andrés Ferrer, Jan Siegel, Javier Solis
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引用次数: 2

Abstract

The energy deposition profile of a focused beam inside a dielectric material is conditioned by linear and nonlinear propagation effects. This can substantially distort the desired shape of the transformed region in laser processing applications [1]. By solving the nonlinear Schrödinger equation (NLSE) using the split-step propagation technique or similar calculation procedures it is possible to perform accurate estimations of the energy deposition profile [2,3]. However, this is usually not practical in terms of a balance between computation time and accuracy. Thus, an experimental study considering various parameters (pulse energy, duration, processing depth, beam ellipticity, etc.) is the typical approach to determine a set of optimized “laser writing” parameters that yield the best result.
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飞秒激光加工介质能量沉积曲线的快速计算
聚焦光束在介质内的能量沉积分布受线性和非线性传播效应的制约。在激光加工应用中,这会极大地扭曲所期望的变换区域形状[1]。通过使用分步传播技术或类似的计算程序求解非线性Schrödinger方程(NLSE),可以对能量沉积剖面进行精确估计[2,3]。然而,就计算时间和准确性之间的平衡而言,这通常是不实际的。因此,考虑各种参数(脉冲能量、持续时间、加工深度、光束椭圆度等)的实验研究是确定一组产生最佳效果的优化“激光书写”参数的典型方法。
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