Highly conducting and transparent sprayed indium tin oxide

Abstract

Spray pyrolysis process has been used to deposit highly transparent and conducting films of tin doped indium oxide onto glass substrates. The electrical, optical and structural properties have been investigated as a function of various deposition parameters namely dopant concentrations, temperature and nature of substrates. X-ray diffraction patterns have shown that deposited films are polycrystalline without second phases and have preferred orientation [400]. Indium tin oxide layers with small resistivity value around 7.10⁻⁵Ω.cm and transmission coefficient in the visible and near IR range of about 85–90 % have been easily obtained.