Determination of refractive indices of materials in modeling multilayer mirrors

A. Sergienko, D. Pushkin, P. Konotopov, A. D. Cheremnykh
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Abstract

Thin-film coatings for optical elements are widely used in various industries. Antireflection coatings are used in display screens, photodetectors, fiber optic light guides, mirror coatings are used for telescopes, medical equipment, etc. One of the main goals in the production of thin-film coatings is to determine the refractive index and the choice of materials applied to optical products. We present the results of determining the refractive indices of materials used for the manufacture of multilayer mirrors with the desired spectral characteristics. In general, light reflection occurs at the interface between two materials, for example, glass and air. Dielectric films were obtained by high-frequency ion-beam sputtering of the target. It is shown that the refractive index of the SiO2 film must be repeatedly corrected to minimize systematic errors. The results obtained can be used in the production of high-precision optical systems for various industries, especially medicine, space instrumentation, aviation and others.
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多层反射镜模型中材料折射率的测定
光学元件薄膜涂层广泛应用于各个行业。增透涂层用于显示屏、光电探测器、光纤导光板,反射镜涂层用于望远镜、医疗设备等。在生产薄膜涂层的主要目标之一是确定折射率和材料的选择应用于光学产品。我们提出了确定用于制造具有所需光谱特性的多层反射镜的材料的折射率的结果。一般来说,光反射发生在两种材料之间的界面,例如玻璃和空气。采用高频离子束溅射法制备了介质膜。结果表明,为了减小系统误差,必须对SiO2薄膜的折射率进行反复校正。所得结果可用于各种行业的高精度光学系统的生产,特别是医药、航天仪器、航空等。
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