Infrared ellipsometric spectroscopy of Mn1.56Co0.96Ni0.48O4 thin films with different layers

Yanqing Gao, Zhiming Huang, Y. Hou, Jing Wu, Wei Zhou, C. Ouyang, J. Chu
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Abstract

High quality Mn1.56Co0.96Ni0.48O4 films with different layers have been prepared on Pt//Ti/SiO2/Si substrate. Infrared optical properties of the films have been investigated using infrared spectroscopic ellipsometry. The optical constants have been obtained by fitting the measured ellipsometric parameter data with classical infrared model.
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不同层数Mn1.56Co0.96Ni0.48O4薄膜的红外椭偏光谱分析
在Pt//Ti/SiO2/Si衬底上制备了不同层数的Mn1.56Co0.96Ni0.48O4薄膜。利用红外光谱椭偏法研究了薄膜的红外光学性能。利用经典红外模型对实测椭偏参数数据进行拟合,得到了光学常数。
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