Structural and Optical Properties of ZnS Thin Films Fabricated by Using RF Sputtering and Rapid Thermal Annealing Process for Buffer Layer in Thin Film Solar Cells

C. Park, Young-Kil Jun
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Abstract

Buffer layer in CIGS thin-film solar cells improves energy conversion efficiency through band alignment between the absorption layer and the window layer. ZnS is a non-toxic II-VI compound semiconductor with direct-transition band gaps and n-conductivity as well as with excellent lattice matching for CIGS absorbent layers. In this study, the structural and optical properties of ZnS thin films, deposited by RF magnetron sputtering method and subsequently performed by the rapid thermal annealing treatment, were investigated for the buffer layer. The zincblende cubic structures along (111), (220), and (311) were shown in all specimens. The rapid thermal annealed specimens at the relatively low temperatures were polycrystalline structure with the wurtzite hexagonal structures along (002). Rapid thermal annealing at high temperatures changed the polycrystalline structure to the single crystal of the zincblende cubic structures. Through the chemical analysis, the zincblende cubic structure was obtained in the specimen with the ratio of Zn/S near stoichiometry. ZnS thin film showed the shifted absorption edge towards the lower wavelength as annealing temperature increased, and the mean optical transmittance in the visible light range increased to 80.40% under 500°C conditions.
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利用射频溅射和快速热退火工艺制备ZnS薄膜的结构和光学性能
CIGS薄膜太阳能电池中的缓冲层通过吸收层和窗口层之间的能带对准来提高能量转换效率。ZnS是一种无毒的II-VI化合物半导体,具有直接跃迁带隙和n导电性,并且具有良好的CIGS吸收层晶格匹配性。本文研究了采用射频磁控溅射法制备的ZnS薄膜的结构和光学性能,并对其进行了快速热退火处理。所有试样均沿(111)、(220)和(311)呈现锌闪锌矿立方结构。在较低温度下快速热退火后的试样为多晶结构,沿(002)为纤锌矿六角形结构。高温快速热处理使锌闪锌矿的多晶结构转变为单晶立方结构。通过化学分析,得到了锌闪石立方结构,锌硫比接近化学计量。随着退火温度的升高,ZnS薄膜的吸收边向较低波长偏移,在500℃条件下,ZnS薄膜可见光范围内的平均透射率提高到80.40%。
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