{"title":"Contactless characterization of MEMS devices using optical microscopy","authors":"A. Timár, G. Bognár","doi":"10.1109/DDECS.2009.5012130","DOIUrl":null,"url":null,"abstract":"In this paper a new approach for measuring depth values of cavities of Micro-Electro Mechanical System (MEMS) is presented. This measurement was done by using a simple optical microscope and image processing techniques. The sample need not to be treated with any foreign material such as reflective or conductive coating.","PeriodicalId":6325,"journal":{"name":"2009 12th International Symposium on Design and Diagnostics of Electronic Circuits & Systems","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2009-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 12th International Symposium on Design and Diagnostics of Electronic Circuits & Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DDECS.2009.5012130","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
In this paper a new approach for measuring depth values of cavities of Micro-Electro Mechanical System (MEMS) is presented. This measurement was done by using a simple optical microscope and image processing techniques. The sample need not to be treated with any foreign material such as reflective or conductive coating.
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