Modal analysis of a structure used as a capacitive MEMS accelerometer sensor

Abstract

In this paper a modal analysis for a proposed capacitive MEMS accelerometer sensor that can be used as inclinometer, dynamic acceleration or vibration sensor, is shown. An analysis of the effect of frequency over the displacement of the movable electrode is made. Besides, it is shown that the natural frequencies and vibration modes depend on the application given to this capacitive sensor. Additionally, the structure here proposed can be manufactured using standard CMOS technology. This paper shows how the same capacitive structure can be used in a MEMS sensor no matter what type of application you will provide. A model of the accelerometer is presented. The simulations shown were obtained using COMSOL.