Measurement of electron temperature (Te) and electron density (ne) of ZnO RF plasma

Abstract

In this study, the ratio method between the two spectral lines was used to calculate the electron temperature (Te) and the density (ne) of argon gas for a zinc oxide (ZnO) cathode using the spectroscopic method. These parameters were calculated at various pressure and powers parameters (0.03,0.04,0.05,and 0.06 torr) and (50,60,70 and 80 W). The results revealed  that while the temperature (Te) increase of the electron with increased power and falls with increasing pressures, the density (ne) of the electrons increases with both power and pressure increases. The measured temperature of the electrons (Te) was within the range of (0.372-0.422 eV).Regarding the electron density (ne), it was in the range of  (1.6×1017-7.8×1017 cm-3).