{"title":"Nanofabrication of sub-wavelength grating using ultra-fine nano-machining process","authors":"J. Nakajima, F. Koyama","doi":"10.1109/CLEO.2008.4552179","DOIUrl":null,"url":null,"abstract":"We present the nanofabrication of sub-wavelength grating using ultra-fine nano-machining process. We successfully demonstrate the nano-machining fabrication of 20 nm grating pitch for nano-structured photonic devices, which is also used for thermal nano-imprint mold.","PeriodicalId":6382,"journal":{"name":"2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science","volume":"5 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2008-05-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEO.2008.4552179","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We present the nanofabrication of sub-wavelength grating using ultra-fine nano-machining process. We successfully demonstrate the nano-machining fabrication of 20 nm grating pitch for nano-structured photonic devices, which is also used for thermal nano-imprint mold.
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